Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing

Nanomechanical resonators made from suspended graphene combine the properties of ultracompactness and ultrahigh detection sensitivity, making them interesting devices for sensing applications. However, nanomechanical systems can be affected by membrane stress. The present work developed an optomecha...

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Bibliographic Details
Main Authors: Shen Liu, Hang Xiao, Yanping Chen, Peijing Chen, Wenqi Yan, Qiao Lin, Bonan Liu, Xizhen Xu, Yiping Wang, Xiaoyu Weng, Liwei Liu, Junle Qu
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/22/23/9068