Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing
Nanomechanical resonators made from suspended graphene combine the properties of ultracompactness and ultrahigh detection sensitivity, making them interesting devices for sensing applications. However, nanomechanical systems can be affected by membrane stress. The present work developed an optomecha...
| Main Authors: | , , , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-11-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/22/23/9068 |
| _version_ | 1827642588611477504 |
|---|---|
| author | Shen Liu Hang Xiao Yanping Chen Peijing Chen Wenqi Yan Qiao Lin Bonan Liu Xizhen Xu Yiping Wang Xiaoyu Weng Liwei Liu Junle Qu |
| author_facet | Shen Liu Hang Xiao Yanping Chen Peijing Chen Wenqi Yan Qiao Lin Bonan Liu Xizhen Xu Yiping Wang Xiaoyu Weng Liwei Liu Junle Qu |
| author_sort | Shen Liu |
| collection | DOAJ |
| description | Nanomechanical resonators made from suspended graphene combine the properties of ultracompactness and ultrahigh detection sensitivity, making them interesting devices for sensing applications. However, nanomechanical systems can be affected by membrane stress. The present work developed an optomechanical resonator for thermal stress sensing. The proposed resonator consists of a section of hollow core fiber (HCF) and a trampoline graphene–Au membrane. An all-optical system that integrated optical excitation and optical detection was applied. Then, the resonance frequency of the resonator was obtained through this all-optical system. In addition, this system and the resonator were used to detect the membrane’s built-in stress, which depended on the ambient temperature, by monitoring the resonance frequency shift. The results verified that the temperature-induced thermal effect had a significant impact on membrane stress. Temperature sensitivities of 2.2646 kHz/°C and 2.3212 kHz/°C were obtained when the temperature rose and fell, respectively. As such, we believe that this device will be beneficial for the quality monitoring of graphene mechanical resonators. |
| first_indexed | 2024-03-09T17:33:22Z |
| format | Article |
| id | doaj.art-eb49df45090b4db2b991f0f7b9299b34 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T17:33:22Z |
| publishDate | 2022-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-eb49df45090b4db2b991f0f7b9299b342023-11-24T12:07:56ZengMDPI AGSensors1424-82202022-11-012223906810.3390/s22239068Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress SensingShen Liu0Hang Xiao1Yanping Chen2Peijing Chen3Wenqi Yan4Qiao Lin5Bonan Liu6Xizhen Xu7Yiping Wang8Xiaoyu Weng9Liwei Liu10Junle Qu11Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, ChinaNanomechanical resonators made from suspended graphene combine the properties of ultracompactness and ultrahigh detection sensitivity, making them interesting devices for sensing applications. However, nanomechanical systems can be affected by membrane stress. The present work developed an optomechanical resonator for thermal stress sensing. The proposed resonator consists of a section of hollow core fiber (HCF) and a trampoline graphene–Au membrane. An all-optical system that integrated optical excitation and optical detection was applied. Then, the resonance frequency of the resonator was obtained through this all-optical system. In addition, this system and the resonator were used to detect the membrane’s built-in stress, which depended on the ambient temperature, by monitoring the resonance frequency shift. The results verified that the temperature-induced thermal effect had a significant impact on membrane stress. Temperature sensitivities of 2.2646 kHz/°C and 2.3212 kHz/°C were obtained when the temperature rose and fell, respectively. As such, we believe that this device will be beneficial for the quality monitoring of graphene mechanical resonators.https://www.mdpi.com/1424-8220/22/23/9068optomechanical resonatorthermal stress sensing |
| spellingShingle | Shen Liu Hang Xiao Yanping Chen Peijing Chen Wenqi Yan Qiao Lin Bonan Liu Xizhen Xu Yiping Wang Xiaoyu Weng Liwei Liu Junle Qu Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing Sensors optomechanical resonator thermal stress sensing |
| title | Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing |
| title_full | Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing |
| title_fullStr | Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing |
| title_full_unstemmed | Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing |
| title_short | Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing |
| title_sort | nano optomechanical resonators based on suspended graphene for thermal stress sensing |
| topic | optomechanical resonator thermal stress sensing |
| url | https://www.mdpi.com/1424-8220/22/23/9068 |
| work_keys_str_mv | AT shenliu nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing AT hangxiao nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing AT yanpingchen nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing AT peijingchen nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing AT wenqiyan nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing AT qiaolin nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing AT bonanliu nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing AT xizhenxu nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing AT yipingwang nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing AT xiaoyuweng nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing AT liweiliu nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing AT junlequ nanooptomechanicalresonatorsbasedonsuspendedgrapheneforthermalstresssensing |