Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors

Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors

This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force. The finite element metho...

Full description

Bibliographic Details
Main Authors: Ming-Zhi Yang, Ching-Liang Dai, Chen-Hsuan Hsieh
Format: Article
Language:English
Published: MDPI AG 2013-10-01
Series:Sensors
Subjects:
magnetic sensor
Lorentz force
CMOS
post-process
Online Access:http://www.mdpi.com/1424-8220/13/11/14728

Internet

http://www.mdpi.com/1424-8220/13/11/14728

Similar Items