Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors
This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force. The finite element metho...
Main Authors: | Ming-Zhi Yang, Ching-Liang Dai, Chen-Hsuan Hsieh |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2013-10-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/13/11/14728 |
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