Review of Recent Progress on Silicon Nitride-Based Photonic Integrated Circuits
Silicon photonic devices used in the photonics industry over the past three decades have helped in realizing large-scale photonic integrated circuits. Silicon nitride (Si<sub>3</sub>N<sub>4</sub>) is another CMOS-compatible platform that provides several advantages such as lo...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9229463/ |