Spectral measurements of inductively coupled and m = +1, −1 helicon discharge modes of the constructed plasma source
In the present context, the industrial type of Amirkabir helicon plasma source has been introduced that was designed and constructed at the Helicon Plasma Laboratory of Amirkabir University of Technology with the aim of using it in material processing applications. Helicon plasma in two m = +1 and m...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5140346 |