Fabrication of Ordered Micro/Nanostructures Using Probe-Based Force-Controlled Micromachining System

Fabrication of Ordered Micro/Nanostructures Using Probe-Based Force-Controlled Micromachining System

Abstract This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures. Both the experimental and finite element simulation approaches are employed to investigate the influence of the interval between the adjacent indentations and the rotation an...

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Bibliographic Details
Main Authors: Yanquan Geng, Yuzhang Wang, Jianxiong Cai, Jingran Zhang, Yongda Yan
Format: Article
Language:English
Published: SpringerOpen 2022-11-01
Series:Chinese Journal of Mechanical Engineering
Subjects:
Ordered micro/nanostructure
Probe-based micromachining
In-process force-controlled
Indentation array
Micro cutting
Online Access:https://doi.org/10.1186/s10033-022-00808-y

Internet

https://doi.org/10.1186/s10033-022-00808-y

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