Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies

Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies

In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant scan modes. Particularly, this paper deals wi...

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Bibliographic Details
Main Authors: Jeong-Yeon Hwang, Lena Wysocki, Erdem Yarar, Gunnar Wille, Fin Röhr, Jörg Albers, Shanshan Gu-Stoppel
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Micromachines
Subjects:
MEMS mirror
aluminum scandium nitride (AlScN)
piezoelectric actuation
quasi-static scan
resonant scan
Online Access:https://www.mdpi.com/2072-666X/14/9/1789

Internet

https://www.mdpi.com/2072-666X/14/9/1789

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