Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies
In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant scan modes. Particularly, this paper deals wi...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-09-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/9/1789 |
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| author | Jeong-Yeon Hwang Lena Wysocki Erdem Yarar Gunnar Wille Fin Röhr Jörg Albers Shanshan Gu-Stoppel |
| author_facet | Jeong-Yeon Hwang Lena Wysocki Erdem Yarar Gunnar Wille Fin Röhr Jörg Albers Shanshan Gu-Stoppel |
| author_sort | Jeong-Yeon Hwang |
| collection | DOAJ |
| description | In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant scan modes. Particularly, this paper deals with various achievable scan patterns including 1D line scan and 2D area scan capabilities and driving methods to realize each scanning strategy. Bidirectional quasi-static actuation along horizontal, vertical, and diagonal scanning directions was experimentally characterized and even under a low voltage level of ±20 V, a total optical scan angle of 10.4° was achieved. In addition, 1D line scanning methods using both resonant and non-resonant frequencies were included and a total optical scan angle of 14° was obtained with 100 mV<sub>pp</sub> under out-of-phase actuation condition. Furthermore, 2D scan patterns including Lissajous, circular and spiral, and raster scans were realized. Diverse scan patterns were realized with the presented AlScN-based MEMS mirror device even under a low level of applied voltage. Further experiments using high voltage up to ±120 V to achieve an enhanced quasi-static scan angle of more than 20° are ongoing to ensure repeatability. This multi-functional MEMS mirror possesses the potential to implement multiple scanning strategies suitable for various application purposes. |
| first_indexed | 2024-03-10T22:27:34Z |
| format | Article |
| id | doaj.art-ebe05b5ad8dc4ded80e23769c6903839 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T22:27:34Z |
| publishDate | 2023-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-ebe05b5ad8dc4ded80e23769c69038392023-11-19T12:00:39ZengMDPI AGMicromachines2072-666X2023-09-01149178910.3390/mi14091789Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning StrategiesJeong-Yeon Hwang0Lena Wysocki1Erdem Yarar2Gunnar Wille3Fin Röhr4Jörg Albers5Shanshan Gu-Stoppel6Fraunhofer Institute for Silicon Technology (ISIT), Fraunhoferstraße 1, 25524 Itzehoe, GermanyFraunhofer Institute for Silicon Technology (ISIT), Fraunhoferstraße 1, 25524 Itzehoe, GermanyFraunhofer Institute for Silicon Technology (ISIT), Fraunhoferstraße 1, 25524 Itzehoe, GermanyFraunhofer Institute for Silicon Technology (ISIT), Fraunhoferstraße 1, 25524 Itzehoe, GermanyFraunhofer Institute for Silicon Technology (ISIT), Fraunhoferstraße 1, 25524 Itzehoe, GermanyFraunhofer Institute for Silicon Technology (ISIT), Fraunhoferstraße 1, 25524 Itzehoe, GermanyFraunhofer Institute for Silicon Technology (ISIT), Fraunhoferstraße 1, 25524 Itzehoe, GermanyIn this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant scan modes. Particularly, this paper deals with various achievable scan patterns including 1D line scan and 2D area scan capabilities and driving methods to realize each scanning strategy. Bidirectional quasi-static actuation along horizontal, vertical, and diagonal scanning directions was experimentally characterized and even under a low voltage level of ±20 V, a total optical scan angle of 10.4° was achieved. In addition, 1D line scanning methods using both resonant and non-resonant frequencies were included and a total optical scan angle of 14° was obtained with 100 mV<sub>pp</sub> under out-of-phase actuation condition. Furthermore, 2D scan patterns including Lissajous, circular and spiral, and raster scans were realized. Diverse scan patterns were realized with the presented AlScN-based MEMS mirror device even under a low level of applied voltage. Further experiments using high voltage up to ±120 V to achieve an enhanced quasi-static scan angle of more than 20° are ongoing to ensure repeatability. This multi-functional MEMS mirror possesses the potential to implement multiple scanning strategies suitable for various application purposes.https://www.mdpi.com/2072-666X/14/9/1789MEMS mirroraluminum scandium nitride (AlScN)piezoelectric actuationquasi-static scanresonant scan |
| spellingShingle | Jeong-Yeon Hwang Lena Wysocki Erdem Yarar Gunnar Wille Fin Röhr Jörg Albers Shanshan Gu-Stoppel Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies Micromachines MEMS mirror aluminum scandium nitride (AlScN) piezoelectric actuation quasi-static scan resonant scan |
| title | Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies |
| title_full | Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies |
| title_fullStr | Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies |
| title_full_unstemmed | Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies |
| title_short | Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies |
| title_sort | low power compact 3d constructed alscn piezoelectric mems mirrors for various scanning strategies |
| topic | MEMS mirror aluminum scandium nitride (AlScN) piezoelectric actuation quasi-static scan resonant scan |
| url | https://www.mdpi.com/2072-666X/14/9/1789 |
| work_keys_str_mv | AT jeongyeonhwang lowpowercompact3dconstructedalscnpiezoelectricmemsmirrorsforvariousscanningstrategies AT lenawysocki lowpowercompact3dconstructedalscnpiezoelectricmemsmirrorsforvariousscanningstrategies AT erdemyarar lowpowercompact3dconstructedalscnpiezoelectricmemsmirrorsforvariousscanningstrategies AT gunnarwille lowpowercompact3dconstructedalscnpiezoelectricmemsmirrorsforvariousscanningstrategies AT finrohr lowpowercompact3dconstructedalscnpiezoelectricmemsmirrorsforvariousscanningstrategies AT jorgalbers lowpowercompact3dconstructedalscnpiezoelectricmemsmirrorsforvariousscanningstrategies AT shanshangustoppel lowpowercompact3dconstructedalscnpiezoelectricmemsmirrorsforvariousscanningstrategies |