Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies
In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant scan modes. Particularly, this paper deals wi...
Main Authors: | Jeong-Yeon Hwang, Lena Wysocki, Erdem Yarar, Gunnar Wille, Fin Röhr, Jörg Albers, Shanshan Gu-Stoppel |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-09-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/9/1789 |
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