Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering

Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering

Abstract Carbon nanotube/polytetrafluoroethylene composite polymer targets are proposed for use in the fabrication of fluorocarbon thin films using the mid-frequency sputtering process. Fluorocarbon thin films deposited using carbon nanotube/polytetrafluoroethylene composite targets exhibit an amorp...

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Bibliographic Details
Main Authors: Sung Hyun Kim, Cheol Hwan Kim, Woo Jin Choi, Tae Gon Lee, Seong Keun Cho, Yong Suk Yang, Jae Heung Lee, Sang-Jin Lee
Format: Article
Language:English
Published: Nature Portfolio 2017-05-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-017-01472-2

Internet

https://doi.org/10.1038/s41598-017-01472-2

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