$Refractory metal-based ohmic contacts on β-Ga2O3 using TiW$

Refractory metal-based ohmic contacts on β-Ga2O3 using TiW

The present work investigates the use of the refractory metal alloy TiW as a possible candidate for the realization of ohmic contacts to the ultrawide bandgap semiconductor β-Ga2O3. Ohmic contact properties were analyzed by transfer length measurements of TiW contacts annealed at temperatures betwee...

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Bibliographic Details
Main Authors:	Kornelius Tetzner, Robert Schewski, Andreas Popp, Saud Bin Anooz, Ta-Shun Chou, Ina Ostermay, Holm Kirmse, Joachim Würfl
Format:	Article
Language:	English
Published:	AIP Publishing LLC 2022-07-01
Series:	APL Materials
Online Access:	http://dx.doi.org/10.1063/5.0094661

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