Fast Acoustic Light Sculpting for On‐Demand Maskless Lithography
Abstract Light interference is the primary enabler of a number of optical maskless techniques for the large‐scale processing of materials at the nanoscale. However, methods controlling interference phenomena can be limited in speed, ease of implementation, or the selection of pattern designs. Here,...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2019-07-01
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| Series: | Advanced Science |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/advs.201900304 |