Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror
Blazed gratings are the critical dispersion elements in spectral analysis instruments, whose performance depends on structural parameters and topography of the grating groove. In this paper, high diffraction efficiency silicon-blazed grating working at 800–2500 nm has been designed and fabricated. B...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-06-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/7/1000 |