Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror
Blazed gratings are the critical dispersion elements in spectral analysis instruments, whose performance depends on structural parameters and topography of the grating groove. In this paper, high diffraction efficiency silicon-blazed grating working at 800–2500 nm has been designed and fabricated. B...
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| Format: | Article |
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MDPI AG
2022-06-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/7/1000 |
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| author | Sinong Zha Dongling Li Quan Wen Ying Zhou Haomiao Zhang |
| author_facet | Sinong Zha Dongling Li Quan Wen Ying Zhou Haomiao Zhang |
| author_sort | Sinong Zha |
| collection | DOAJ |
| description | Blazed gratings are the critical dispersion elements in spectral analysis instruments, whose performance depends on structural parameters and topography of the grating groove. In this paper, high diffraction efficiency silicon-blazed grating working at 800–2500 nm has been designed and fabricated. By diffraction theory analysis and simulation optimization based on the accurate boundary integral equation method, the blaze angle and grating constant are determined to be 8.8° and 4 μm, respectively. The diffraction efficiency is greater than 33.23% in the spectral range of 800–2500 nm and reach the maximum value of 85.62% at the blaze wavelength of 1180 nm. The effect of platform and fillet on diffraction efficiency is analyzed, and the formation rule and elimination method of the platform are studied. The blazed gratings are fabricated by anisotropic wet etching process using tilted (111) silicon substrate. The platform is minished by controlling etching time and oxidation sharpening process. The fillet radius of the fabricated grating is 50 nm, the blaze angle is 7.4°, and the surface roughness is 0.477 nm. Finally, the blazed grating is integrated in scanning micromirror to form scanning grating micromirror by MEMS fabrication technology, which can realize both optical splitting and scanning. The testing results show that the scanning grating micromirror has high diffraction efficiency in the spectral range of 810–2500 nm for the potential near-infrared spectrometer application. |
| first_indexed | 2024-03-09T06:13:10Z |
| format | Article |
| id | doaj.art-ec8fadfec9c34a75805ad2c2d6cf6645 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T06:13:10Z |
| publishDate | 2022-06-01 |
| publisher | MDPI AG |
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| series | Micromachines |
| spelling | doaj.art-ec8fadfec9c34a75805ad2c2d6cf66452023-12-03T11:57:23ZengMDPI AGMicromachines2072-666X2022-06-01137100010.3390/mi13071000Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating MicromirrorSinong Zha0Dongling Li1Quan Wen2Ying Zhou3Haomiao Zhang4Key Laboratory of Optoelectronic Technology and System of the Education Ministry of China, Chongqing University, Chongqing 400030, ChinaKey Laboratory of Optoelectronic Technology and System of the Education Ministry of China, Chongqing University, Chongqing 400030, ChinaKey Laboratory of Optoelectronic Technology and System of the Education Ministry of China, Chongqing University, Chongqing 400030, ChinaChongqing Chuanyi Automation Co., Ltd., Chongqing 401121, ChinaKey Laboratory of Optoelectronic Technology and System of the Education Ministry of China, Chongqing University, Chongqing 400030, ChinaBlazed gratings are the critical dispersion elements in spectral analysis instruments, whose performance depends on structural parameters and topography of the grating groove. In this paper, high diffraction efficiency silicon-blazed grating working at 800–2500 nm has been designed and fabricated. By diffraction theory analysis and simulation optimization based on the accurate boundary integral equation method, the blaze angle and grating constant are determined to be 8.8° and 4 μm, respectively. The diffraction efficiency is greater than 33.23% in the spectral range of 800–2500 nm and reach the maximum value of 85.62% at the blaze wavelength of 1180 nm. The effect of platform and fillet on diffraction efficiency is analyzed, and the formation rule and elimination method of the platform are studied. The blazed gratings are fabricated by anisotropic wet etching process using tilted (111) silicon substrate. The platform is minished by controlling etching time and oxidation sharpening process. The fillet radius of the fabricated grating is 50 nm, the blaze angle is 7.4°, and the surface roughness is 0.477 nm. Finally, the blazed grating is integrated in scanning micromirror to form scanning grating micromirror by MEMS fabrication technology, which can realize both optical splitting and scanning. The testing results show that the scanning grating micromirror has high diffraction efficiency in the spectral range of 810–2500 nm for the potential near-infrared spectrometer application.https://www.mdpi.com/2072-666X/13/7/1000silicon-blazed gratingplatform and filletanisotropic wet etchingoxidation sharpeningdiffraction efficiency |
| spellingShingle | Sinong Zha Dongling Li Quan Wen Ying Zhou Haomiao Zhang Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror Micromachines silicon-blazed grating platform and fillet anisotropic wet etching oxidation sharpening diffraction efficiency |
| title | Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror |
| title_full | Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror |
| title_fullStr | Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror |
| title_full_unstemmed | Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror |
| title_short | Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror |
| title_sort | design and fabrication of silicon blazed gratings for near infrared scanning grating micromirror |
| topic | silicon-blazed grating platform and fillet anisotropic wet etching oxidation sharpening diffraction efficiency |
| url | https://www.mdpi.com/2072-666X/13/7/1000 |
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