High-performance temperature control system for resistance furnace annealing and crystal growth of semiconductor compounds
This paper describes the control system for the annealing and growth of semiconductor crystals. In this process, precise temperature control is crucial to obtain high-quality samples. For this reason, a high-performance temperature control based on the PID controller augmented in the gain-scheduling...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-03-01
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| Series: | Results in Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590123022005333 |