Transparent conducting properties of Re-doped β-MoO3 films

We report the significant increase in the electrical conductivity, by five orders of magnitude, of Re-doped β-MoO3 epitaxial films grown using reactive DC magnetron sputtering. Re atoms were successfully incorporated into the films by using Mo-Re alloy targets, although the film compositions deviate...

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Bibliographic Details
Main Authors: Kuniko Yamamoto, Ryota Shimizu, Susumu Shiraki, Taro Hitosugi
Format: Article
Language:English
Published: AIP Publishing LLC 2016-09-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/1.4963154