Calibration-free real-time organic film thickness monitoring technique by reflected X-Ray fluorescence and compton scattering measurement
Most thickness measurement techniques using X-ray radiation are unsuitable in field processes involving fast-moving organic films. Herein, we propose a Compton scattering X-ray radiation method, which probes the light elements in organic materials, and a new simple, non-destructive, and non-contact...
Main Authors: | , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Elsevier
2021-04-01
|
Series: | Nuclear Engineering and Technology |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S1738573320308809 |