Calibration-free real-time organic film thickness monitoring technique by reflected X-Ray fluorescence and compton scattering measurement

Most thickness measurement techniques using X-ray radiation are unsuitable in field processes involving fast-moving organic films. Herein, we propose a Compton scattering X-ray radiation method, which probes the light elements in organic materials, and a new simple, non-destructive, and non-contact...

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Bibliographic Details
Main Authors: Junghwan Park, Yong Suk Choi, Junhyuck Kim, Jeongmook Lee, Tae Jun Kim, Young-Sang Youn, Sang Ho Lim, Jong-Yun Kim
Format: Article
Language:English
Published: Elsevier 2021-04-01
Series:Nuclear Engineering and Technology
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S1738573320308809