Mechanical dicing of optical quality facets and waveguides in a silicon nitride platform
Abstract The authors report a ductile dicing process for manufacturing optical‐quality facets in a multi‐layered silicon nitride platform without the need for polishing. A surface roughness (Sa) of 1.5 nm was achieved. This technique was extended to fabricate ridge waveguides, and the results and ch...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2024-03-01
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| Series: | Electronics Letters |
| Subjects: | |
| Online Access: | https://doi.org/10.1049/ell2.13138 |