Silicon Multi-Pass Gas Cell for Chip-Scale Gas Analysis by Absorption Spectroscopy
Semiconductor and micro-electromechanical system (MEMS) technologies have been already proved as strong solutions for producing miniaturized optical spectrometers, light sources and photodetectors. However, the implementation of optical absorption spectroscopy for in-situ gas analysis requires furth...
| Príomhchruthaitheoirí: | , , , , , |
|---|---|
| Formáid: | Alt |
| Teanga: | English |
| Foilsithe / Cruthaithe: |
MDPI AG
2020-04-01
|
| Sraith: | Micromachines |
| Ábhair: | |
| Rochtain ar líne: | https://www.mdpi.com/2072-666X/11/5/463 |