Guiding Chart for Initial Layer Choice with Nanoimprint Lithography

When nanoimprint serves as a lithography process, it is most attractive for the ability to overcome the typical residual layer remaining without the need for etching. Then, ‘partial cavity filling’ is an efficient strategy to provide a negligible residual layer. However, this strategy requires an ad...

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书目详细资料
Main Authors: Andre Mayer, Hella-Christin Scheer
格式: 文件
语言:English
出版: MDPI AG 2021-03-01
丛编:Nanomaterials
主题:
在线阅读:https://www.mdpi.com/2079-4991/11/3/710