Study on Dynamic Characterization and Vibration Reduction of Scrubber Structures Using Fluid Structure Interaction Analysis
A scrubber is an important structure in post-semiconductor processes. It is impossible to completely modify the entire structure of an already installed and operating scrubber if a vibration problem occurs. Therefore, it is essential to determine the cause of vibrations and reinforce the structure....
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-05-01
|
| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/12/10/5207 |