Characterization upon electrical hysteresis and thermal diffusion of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>dielectric film
<p>Abstract</p> <p>In this paper, we have investigated the electrical properties of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>film as electrical gate insulator deposited by pulsed laser deposition and presented a simple method to describe the ther...
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SpringerOpen
2011-01-01
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Series: | Nanoscale Research Letters |
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Online Access: | http://www.nanoscalereslett.com/content/6/1/557 |
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author | Liu Zhiguo Shi Lei |
author_facet | Liu Zhiguo Shi Lei |
author_sort | Liu Zhiguo |
collection | DOAJ |
description | <p>Abstract</p> <p>In this paper, we have investigated the electrical properties of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>film as electrical gate insulator deposited by pulsed laser deposition and presented a simple method to describe the thermal diffusion behaviors of metal atoms at TiAl<sub>3</sub>O<sub> <it>x</it> </sub>/Si interfacial region in detail. The TiAl<sub>3</sub>O<sub> <it>x </it> </sub>films show obvious electrical hysteresis by the capacitance-voltage measurements after post-annealing treatment. By virtue of the diffusion models composed of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>film and silicon, the diffusion coefficient and the diffusion activation energy of the Ti and Al atoms are extracted. It is valuable to further investigate the pseudobinary oxide system in practice.</p> <p> <b>PACS: </b>77.55.-g; 81.15.Fg; 81.40.Gh.</p> |
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issn | 1931-7573 1556-276X |
language | English |
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publisher | SpringerOpen |
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series | Nanoscale Research Letters |
spelling | doaj.art-ed66ef82a06a4bfe94e749bf3ce807da2023-09-02T10:19:10ZengSpringerOpenNanoscale Research Letters1931-75731556-276X2011-01-0161557Characterization upon electrical hysteresis and thermal diffusion of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>dielectric filmLiu ZhiguoShi Lei<p>Abstract</p> <p>In this paper, we have investigated the electrical properties of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>film as electrical gate insulator deposited by pulsed laser deposition and presented a simple method to describe the thermal diffusion behaviors of metal atoms at TiAl<sub>3</sub>O<sub> <it>x</it> </sub>/Si interfacial region in detail. The TiAl<sub>3</sub>O<sub> <it>x </it> </sub>films show obvious electrical hysteresis by the capacitance-voltage measurements after post-annealing treatment. By virtue of the diffusion models composed of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>film and silicon, the diffusion coefficient and the diffusion activation energy of the Ti and Al atoms are extracted. It is valuable to further investigate the pseudobinary oxide system in practice.</p> <p> <b>PACS: </b>77.55.-g; 81.15.Fg; 81.40.Gh.</p>http://www.nanoscalereslett.com/content/6/1/557electrical hysteresisthermal diffusionpulsed laser deposition |
spellingShingle | Liu Zhiguo Shi Lei Characterization upon electrical hysteresis and thermal diffusion of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>dielectric film Nanoscale Research Letters electrical hysteresis thermal diffusion pulsed laser deposition |
title | Characterization upon electrical hysteresis and thermal diffusion of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>dielectric film |
title_full | Characterization upon electrical hysteresis and thermal diffusion of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>dielectric film |
title_fullStr | Characterization upon electrical hysteresis and thermal diffusion of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>dielectric film |
title_full_unstemmed | Characterization upon electrical hysteresis and thermal diffusion of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>dielectric film |
title_short | Characterization upon electrical hysteresis and thermal diffusion of TiAl<sub>3</sub>O<sub> <it>x </it> </sub>dielectric film |
title_sort | characterization upon electrical hysteresis and thermal diffusion of tial sub 3 sub o sub it x it sub dielectric film |
topic | electrical hysteresis thermal diffusion pulsed laser deposition |
url | http://www.nanoscalereslett.com/content/6/1/557 |
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