Control of flow, thermal and pollutant concentration fields by entrainer air streams to improve fresh air quality intake into a semiconductor manufacture/ processing plant
Simulations of turbulent flow, thermal and concentration fields around a semiconductor manufacture/processing plant are reported. Monitored pollutants are ammonia (NH3), hydrofluoric acid (HF), total volatile organic compounds (TVOC) and PM2.5 that are released from chimneys on the roofs of various...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2022-11-01
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Series: | International Journal of Thermofluids |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S266620272200074X |