Control of flow, thermal and pollutant concentration fields by entrainer air streams to improve fresh air quality intake into a semiconductor manufacture/ processing plant
Simulations of turbulent flow, thermal and concentration fields around a semiconductor manufacture/processing plant are reported. Monitored pollutants are ammonia (NH3), hydrofluoric acid (HF), total volatile organic compounds (TVOC) and PM2.5 that are released from chimneys on the roofs of various...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-11-01
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| Series: | International Journal of Thermofluids |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S266620272200074X |