FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION
Design and fabrication technique of four sensor gas microsystem based on nanoporous anodic alumina have been developed. Simulation of basic elements′ temperature and thermo-mechanical deformation created in the microsystem construction has been carried out by finite element method. r-spacing:-.05pt&...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2015-03-01
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| Series: | Pribory i Metody Izmerenij |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/38 |