Comparative study of electro‐thermal characteristics of 4500 V diffusion‐CS IGBT and buried‐CS IGBT

Abstract This article compares the major characteristics of the Insulated Gate Bipolar Transistor with Diffusion Carrier Stored (CS) layer (DCS‐IGBT) and the Insulated Gate Bipolar Transistor with the Buried CS layer (BCS‐IGBT). In the DCS‐IGBT, an N‐well is formed by phosphorus ion implantation and...

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Main Authors: Rui Jin, Yaohua Wang, Li Li, Longlai Xu, Kui Pu, Jun Zeng, Mohamed Darwish
Format: Article
Language:English
Published: Hindawi-IET 2021-05-01
Series:IET Circuits, Devices and Systems
Subjects:
Online Access:https://doi.org/10.1049/cds2.12022
_version_ 1827079741431087104
author Rui Jin
Yaohua Wang
Li Li
Longlai Xu
Kui Pu
Jun Zeng
Mohamed Darwish
author_facet Rui Jin
Yaohua Wang
Li Li
Longlai Xu
Kui Pu
Jun Zeng
Mohamed Darwish
author_sort Rui Jin
collection DOAJ
description Abstract This article compares the major characteristics of the Insulated Gate Bipolar Transistor with Diffusion Carrier Stored (CS) layer (DCS‐IGBT) and the Insulated Gate Bipolar Transistor with the Buried CS layer (BCS‐IGBT). In the DCS‐IGBT, an N‐well is formed by phosphorus ion implantation and drive‐in for creating the CS layer, whereas, in the BCS‐IGBT, the CS layer is formed by forming a buried layer implant followed by growing an epitaxial layer. It is found that, at blocking voltage of 5700 V, the BCS‐IGBT achieves an on‐state voltage, VCEsat, of 2.04 V at a current density of 75 A/cm2 for a gate voltage of 15 V. Under the same conditions, the on‐state voltage of DCS‐IGBT is 2.32 V, which is about 0.28 V higher than that of the BCS‐IGBT at room temperature. Additionally, at 125°C the VCEsat of the DCS‐IGBT is about 0.38 V higher than that of the BCS‐IGBT. TCAD simulations are employed to investigate and explain the electro‐thermal characteristics differences between these two devices. Furthermore, the ruggedness of the both devices are studied and compared. It is found that the DCS‐IGBT is more rugged than BCS‐IGBT, for example the short‐circuit withstanding time (SCWT) of DCS‐IGBT and BCS‐IGBT are 22 and 16 µs, respectively.
first_indexed 2024-03-09T07:40:47Z
format Article
id doaj.art-ed8bb2ec2f9f4f59a6da75c885274b7a
institution Directory Open Access Journal
issn 1751-858X
1751-8598
language English
last_indexed 2025-03-20T02:50:23Z
publishDate 2021-05-01
publisher Hindawi-IET
record_format Article
series IET Circuits, Devices and Systems
spelling doaj.art-ed8bb2ec2f9f4f59a6da75c885274b7a2024-10-03T07:27:45ZengHindawi-IETIET Circuits, Devices and Systems1751-858X1751-85982021-05-0115325125910.1049/cds2.12022Comparative study of electro‐thermal characteristics of 4500 V diffusion‐CS IGBT and buried‐CS IGBTRui Jin0Yaohua Wang1Li Li2Longlai Xu3Kui Pu4Jun Zeng5Mohamed Darwish6State Key Laboratory of Advanced Power Transmission Technology Global Energy Interconnection Research Institute Company Limited Beijing ChinaState Key Laboratory of Advanced Power Transmission Technology Global Energy Interconnection Research Institute Company Limited Beijing ChinaState Key Laboratory of Advanced Power Transmission Technology Global Energy Interconnection Research Institute Company Limited Beijing ChinaMaxPower Semiconductor Inc. Chengdu ChinaMaxPower Semiconductor Inc. Chengdu ChinaMaxPower Semiconductor Inc. San Jose California USAMaxPower Semiconductor Inc. San Jose California USAAbstract This article compares the major characteristics of the Insulated Gate Bipolar Transistor with Diffusion Carrier Stored (CS) layer (DCS‐IGBT) and the Insulated Gate Bipolar Transistor with the Buried CS layer (BCS‐IGBT). In the DCS‐IGBT, an N‐well is formed by phosphorus ion implantation and drive‐in for creating the CS layer, whereas, in the BCS‐IGBT, the CS layer is formed by forming a buried layer implant followed by growing an epitaxial layer. It is found that, at blocking voltage of 5700 V, the BCS‐IGBT achieves an on‐state voltage, VCEsat, of 2.04 V at a current density of 75 A/cm2 for a gate voltage of 15 V. Under the same conditions, the on‐state voltage of DCS‐IGBT is 2.32 V, which is about 0.28 V higher than that of the BCS‐IGBT at room temperature. Additionally, at 125°C the VCEsat of the DCS‐IGBT is about 0.38 V higher than that of the BCS‐IGBT. TCAD simulations are employed to investigate and explain the electro‐thermal characteristics differences between these two devices. Furthermore, the ruggedness of the both devices are studied and compared. It is found that the DCS‐IGBT is more rugged than BCS‐IGBT, for example the short‐circuit withstanding time (SCWT) of DCS‐IGBT and BCS‐IGBT are 22 and 16 µs, respectively.https://doi.org/10.1049/cds2.12022buried layersinsulated gate bipolar transistorsion implantationphosphorussemiconductor device modelstechnology CAD (electronics)
spellingShingle Rui Jin
Yaohua Wang
Li Li
Longlai Xu
Kui Pu
Jun Zeng
Mohamed Darwish
Comparative study of electro‐thermal characteristics of 4500 V diffusion‐CS IGBT and buried‐CS IGBT
IET Circuits, Devices and Systems
buried layers
insulated gate bipolar transistors
ion implantation
phosphorus
semiconductor device models
technology CAD (electronics)
title Comparative study of electro‐thermal characteristics of 4500 V diffusion‐CS IGBT and buried‐CS IGBT
title_full Comparative study of electro‐thermal characteristics of 4500 V diffusion‐CS IGBT and buried‐CS IGBT
title_fullStr Comparative study of electro‐thermal characteristics of 4500 V diffusion‐CS IGBT and buried‐CS IGBT
title_full_unstemmed Comparative study of electro‐thermal characteristics of 4500 V diffusion‐CS IGBT and buried‐CS IGBT
title_short Comparative study of electro‐thermal characteristics of 4500 V diffusion‐CS IGBT and buried‐CS IGBT
title_sort comparative study of electro thermal characteristics of 4500 v diffusion cs igbt and buried cs igbt
topic buried layers
insulated gate bipolar transistors
ion implantation
phosphorus
semiconductor device models
technology CAD (electronics)
url https://doi.org/10.1049/cds2.12022
work_keys_str_mv AT ruijin comparativestudyofelectrothermalcharacteristicsof4500vdiffusioncsigbtandburiedcsigbt
AT yaohuawang comparativestudyofelectrothermalcharacteristicsof4500vdiffusioncsigbtandburiedcsigbt
AT lili comparativestudyofelectrothermalcharacteristicsof4500vdiffusioncsigbtandburiedcsigbt
AT longlaixu comparativestudyofelectrothermalcharacteristicsof4500vdiffusioncsigbtandburiedcsigbt
AT kuipu comparativestudyofelectrothermalcharacteristicsof4500vdiffusioncsigbtandburiedcsigbt
AT junzeng comparativestudyofelectrothermalcharacteristicsof4500vdiffusioncsigbtandburiedcsigbt
AT mohameddarwish comparativestudyofelectrothermalcharacteristicsof4500vdiffusioncsigbtandburiedcsigbt