A Review on Resonant MEMS Electric Field Sensors
Electric field sensors (EFSs) are widely used in various fields, particularly in accurately assessing atmospheric electric fields and high-voltage power lines. Precisely detecting electric fields enhances the accuracy of weather forecasting and contributes to the safe operation of power grids. This...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-10-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/11/1333 |