Surface Morphology and Optical Properties of Hafnium Oxide Thin Films Produced by Magnetron Sputtering

Surface Morphology and Optical Properties of Hafnium Oxide Thin Films Produced by Magnetron Sputtering

Hafnium oxide films were deposited on sapphire and silicon (100) substrates using the DC reactive magnetron sputtering technique from a pure hafnium target at different discharge power levels. The influence of the cathode power on the chemical composition, morphology, crystallographic structure and...

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Bibliographic Details
Main Authors: José de Jesús Araiza, Leo Álvarez-Fraga, Raúl Gago, Olga Sánchez
Format: Article
Language:English
Published: MDPI AG 2023-07-01
Series:Materials
Subjects:
HfO<sub>2</sub>
magnetron sputtering
bonding structure
morphology
blister
optical properties
Online Access:https://www.mdpi.com/1996-1944/16/15/5331

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https://www.mdpi.com/1996-1944/16/15/5331

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