Fabrication of MEMS Directional Acoustic Sensors for Underwater Operation
In this work, microelectromechanical systems (MEMS)-based directional acoustic sensors operating in an underwater environment are explored. The studied sensors consist of a free-standing single wing or two wings pivoted to a substrate. The sensors operate in a narrow frequency band determined by the...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-02-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/5/1245 |