Fully Relaxed, Crack-Free AlGaN with upto 50% Al Composition Grown on Porous GaN Pseudo-Substrate
Fully relaxed, crack free, smooth Al<sub>x</sub>Ga<sub>1−x</sub>N layers with up to 50% Al composition were demonstrated on pseudo-substrates composed of dense arrays of 10 × 10 µm<sup>2</sup> compliant porous GaN-on-porous-GaN tiles. The AlGaN layers were grown i...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-07-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/12/7/989 |