A review on potential use of cerium oxide and doped cerium oxide as high dielectric constant seed layers for overgrowth of cerium oxide nanostructures
In this review, an introduction to nanostructured films focusing on cerium oxide (CeO _2 ) as high dielectric constant ( k ) material for silicon-based metal-oxide-semiconductor devices, and subsequently background of using low k silicon dioxide as well as the transition to high k materials was pres...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2024-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/ad52ef |