Ultraviolet-photoelectric effect for augmented contrast and resolution in electron microscopy
A new tool providing material contrast control in scanning electron microscopy (SEM) is demonstrated. The approach is based on deep-UV illumination during SEM imaging and delivers a novel material based contrast as well as higher resolution due to the photoelectric effect. Electrons liberated from i...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-05-01
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| Series: | APL Photonics |
| Online Access: | http://dx.doi.org/10.1063/1.4945357 |