Ultraviolet-photoelectric effect for augmented contrast and resolution in electron microscopy
A new tool providing material contrast control in scanning electron microscopy (SEM) is demonstrated. The approach is based on deep-UV illumination during SEM imaging and delivers a novel material based contrast as well as higher resolution due to the photoelectric effect. Electrons liberated from i...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-05-01
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| Series: | APL Photonics |
| Online Access: | http://dx.doi.org/10.1063/1.4945357 |
| _version_ | 1798043590605144064 |
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| author | Gediminas Seniutinas Armandas Balčytis Saulius Juodkazis |
| author_facet | Gediminas Seniutinas Armandas Balčytis Saulius Juodkazis |
| author_sort | Gediminas Seniutinas |
| collection | DOAJ |
| description | A new tool providing material contrast control in scanning electron microscopy (SEM) is demonstrated. The approach is based on deep-UV illumination during SEM imaging and delivers a novel material based contrast as well as higher resolution due to the photoelectric effect. Electrons liberated from illuminated sample surface contribute to the imaging which can be carried out at a faster acquisition rate, provide material selective contrast, reduce distortions caused by surface charging, and can substitute metal coating in SEM. These features provide high fidelity SEM imaging and are expected to significantly improve the performance of electron beam instruments as well as to open new opportunities for imaging and characterization of materials at the nanoscale. |
| first_indexed | 2024-04-11T22:51:16Z |
| format | Article |
| id | doaj.art-ee51abbafe7b415d9b00efc3b25afd23 |
| institution | Directory Open Access Journal |
| issn | 2378-0967 |
| language | English |
| last_indexed | 2024-04-11T22:51:16Z |
| publishDate | 2016-05-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | APL Photonics |
| spelling | doaj.art-ee51abbafe7b415d9b00efc3b25afd232022-12-22T03:58:35ZengAIP Publishing LLCAPL Photonics2378-09672016-05-0112021301021301-510.1063/1.4945357010601APPUltraviolet-photoelectric effect for augmented contrast and resolution in electron microscopyGediminas Seniutinas0Armandas Balčytis1Saulius Juodkazis2Faculty of Science, Engineering and Technology, Swinburne University of Technology, John St., Hawthorn, Victoria 3122, AustraliaFaculty of Science, Engineering and Technology, Swinburne University of Technology, John St., Hawthorn, Victoria 3122, AustraliaFaculty of Science, Engineering and Technology, Swinburne University of Technology, John St., Hawthorn, Victoria 3122, AustraliaA new tool providing material contrast control in scanning electron microscopy (SEM) is demonstrated. The approach is based on deep-UV illumination during SEM imaging and delivers a novel material based contrast as well as higher resolution due to the photoelectric effect. Electrons liberated from illuminated sample surface contribute to the imaging which can be carried out at a faster acquisition rate, provide material selective contrast, reduce distortions caused by surface charging, and can substitute metal coating in SEM. These features provide high fidelity SEM imaging and are expected to significantly improve the performance of electron beam instruments as well as to open new opportunities for imaging and characterization of materials at the nanoscale.http://dx.doi.org/10.1063/1.4945357 |
| spellingShingle | Gediminas Seniutinas Armandas Balčytis Saulius Juodkazis Ultraviolet-photoelectric effect for augmented contrast and resolution in electron microscopy APL Photonics |
| title | Ultraviolet-photoelectric effect for augmented contrast and resolution in electron microscopy |
| title_full | Ultraviolet-photoelectric effect for augmented contrast and resolution in electron microscopy |
| title_fullStr | Ultraviolet-photoelectric effect for augmented contrast and resolution in electron microscopy |
| title_full_unstemmed | Ultraviolet-photoelectric effect for augmented contrast and resolution in electron microscopy |
| title_short | Ultraviolet-photoelectric effect for augmented contrast and resolution in electron microscopy |
| title_sort | ultraviolet photoelectric effect for augmented contrast and resolution in electron microscopy |
| url | http://dx.doi.org/10.1063/1.4945357 |
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