n+ GaAs/AuGeNi-Au Thermocouple-Type RF MEMS Power Sensors Based on Dual Thermal Flow Paths in GaAs MMIC

n+ GaAs/AuGeNi-Au Thermocouple-Type RF MEMS Power Sensors Based on Dual Thermal Flow Paths in GaAs MMIC

To achieve radio frequency (RF) power detection, gain control, and circuit protection, this paper presents n+ GaAs/AuGeNi-Au thermocouple-type RF microelectromechanical system (MEMS) power sensors based on dual thermal flow paths. The sensors utilize a conversion principle of RF power-heat-voltage,...

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Bibliographic Details
Main Authors: Zhiqiang Zhang, Xiaoping Liao
Format: Article
Language:English
Published: MDPI AG 2017-06-01
Series:Sensors
Subjects:
n+ GaAs/AuGeNi-Au thermocouples
thermal flow path
GaAs MMIC
microwave measurement
power sensor
RF MEMS
Online Access:http://www.mdpi.com/1424-8220/17/6/1426

Internet

http://www.mdpi.com/1424-8220/17/6/1426

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