Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles

Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles

In the present paper, we have analytically explored the small variations of the local pressure in the trapped air film of both sides of the clamped circular capacitive micromachined ultrasonic transducer (CMUT), which consists of a thin movable membrane of silicon nitride (Si<sub>3</sub>...

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Bibliographic Details
Main Authors: Avik Ghosh Dastidar, Reshmi Maity, Ramesh Chandra Tiwari, Dejan Vidojevic, Tijana S. Kevkic, Vojkan Nikolic, Subhajit Das, Niladri Pratap Maity
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Sensors
Subjects:
CMUT
Reynold’s equation
displacement profile
pressure profile
modified Bessel’s equation
FEM
Online Access:https://www.mdpi.com/1424-8220/23/10/4665

Internet

https://www.mdpi.com/1424-8220/23/10/4665

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