Preparación de recubrimientos cerámicos mediante técnicas de CVD
The fundamentals of the Chemical Vapour Deposition (CVD) techniques and the key parameters determining the characteristics of the deposited layers are described. In addition, we discuss the different activation methods of the precursor gases which are necessary to achieve high reaction rates, and gi...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
1998-12-01
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| Series: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Subjects: | |
| Online Access: | http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/984/1018 |