Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit

Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit

A MEMS thin-film getter–heater unit has been previously proposed for the vacuum packaging of a Micro-Electro-Mechanical System (MEMS) device, where the floating structure (FS) design is found to be obviously more power-efficient than the solid structure (SS) one by heat transfer capacity simulation....

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Bibliographic Details
Main Authors: Xinlin Peng, Yucheng Ji, Shuo Chen, Song Guo, Liuhaodong Feng, Yang Xu, Shinan Wang
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Micromachines
Subjects:
MEMS getter–heater unit
cantilever model
symmetrically-shaped heater and edge–center-located cantilever structure
stress and deformation displacement simulation
interfacial stress simulation
Online Access:https://www.mdpi.com/2072-666X/13/12/2252

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https://www.mdpi.com/2072-666X/13/12/2252

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