Formation of the film-thickness gradient for films deposited in a gradient magnetic field(梯度磁场中薄膜厚度梯度的形成机理)

借助于基片下方放置的磁铁,在溅射的放电空间中引入了纵向的梯度磁场.辉光放电时,其外貌发生了显著的收缩,由此沉积的薄膜在平面内存在明显的厚度梯度.用磁场中带电粒子的运动理论解释了此种薄膜的形成机制.

Bibliographic Details
Main Authors:	ZHUYan(朱炎), DIGuo-qing(狄国庆), CHENYa-jie(陈亚杰), ZHAODeng-tao(赵登涛)
Format:	Article
Language:	zho
Published:	Zhejiang University Press 2002-07-01
Series:	Zhejiang Daxue xuebao. Lixue ban
Subjects:	磁场梯度磁镜磁控溅射辉光厚度梯度
Online Access:	https://doi.org/zjup/1008-9497.2002.29.4.395-399

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