Formation of the film-thickness gradient for films deposited in a gradient magnetic field(梯度磁场中薄膜厚度梯度的形成机理)
借助于基片下方放置的磁铁,在溅射的放电空间中引入了纵向的梯度磁场.辉光放电时,其外貌发生了显著的收缩,由此沉积的薄膜在平面内存在明显的厚度梯度.用磁场中带电粒子的运动理论解释了此种薄膜的形成机制.
| Main Authors: | , , , |
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| Format: | Article |
| Language: | zho |
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Zhejiang University Press
2002-07-01
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| Series: | Zhejiang Daxue xuebao. Lixue ban |
| Subjects: | |
| Online Access: | https://doi.org/zjup/1008-9497.2002.29.4.395-399 |
| _version_ | 1797236534854811648 |
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| author | ZHUYan(朱炎) DIGuo-qing(狄国庆) CHENYa-jie(陈亚杰) ZHAODeng-tao(赵登涛) |
| author_facet | ZHUYan(朱炎) DIGuo-qing(狄国庆) CHENYa-jie(陈亚杰) ZHAODeng-tao(赵登涛) |
| author_sort | ZHUYan(朱炎) |
| collection | DOAJ |
| description | 借助于基片下方放置的磁铁,在溅射的放电空间中引入了纵向的梯度磁场.辉光放电时,其外貌发生了显著的收缩,由此沉积的薄膜在平面内存在明显的厚度梯度.用磁场中带电粒子的运动理论解释了此种薄膜的形成机制. |
| first_indexed | 2024-04-24T17:05:23Z |
| format | Article |
| id | doaj.art-ef91afbfee9d4283a3661922c463641a |
| institution | Directory Open Access Journal |
| issn | 1008-9497 |
| language | zho |
| last_indexed | 2024-04-24T17:05:23Z |
| publishDate | 2002-07-01 |
| publisher | Zhejiang University Press |
| record_format | Article |
| series | Zhejiang Daxue xuebao. Lixue ban |
| spelling | doaj.art-ef91afbfee9d4283a3661922c463641a2024-03-29T01:58:18ZzhoZhejiang University PressZhejiang Daxue xuebao. Lixue ban1008-94972002-07-01294395399zjup/1008-9497.2002.29.4.395-399Formation of the film-thickness gradient for films deposited in a gradient magnetic field(梯度磁场中薄膜厚度梯度的形成机理)ZHUYan(朱炎)0DIGuo-qing(狄国庆)1CHENYa-jie(陈亚杰)2ZHAODeng-tao(赵登涛)3Department of Physics, Suzhou University, Suzhou 215006, China(苏州大学物理系，江苏 苏州 215006)Department of Physics, Suzhou University, Suzhou 215006, China(苏州大学物理系，江苏 苏州 215006)Department of Physics, Suzhou University, Suzhou 215006, China(苏州大学物理系，江苏 苏州 215006)Department of Physics, Suzhou University, Suzhou 215006, China(苏州大学物理系，江苏 苏州 215006)借助于基片下方放置的磁铁,在溅射的放电空间中引入了纵向的梯度磁场.辉光放电时,其外貌发生了显著的收缩,由此沉积的薄膜在平面内存在明显的厚度梯度.用磁场中带电粒子的运动理论解释了此种薄膜的形成机制.https://doi.org/zjup/1008-9497.2002.29.4.395-399磁场梯度磁镜磁控溅射辉光厚度梯度 |
| spellingShingle | ZHUYan(朱炎) DIGuo-qing(狄国庆) CHENYa-jie(陈亚杰) ZHAODeng-tao(赵登涛) Formation of the film-thickness gradient for films deposited in a gradient magnetic field(梯度磁场中薄膜厚度梯度的形成机理) Zhejiang Daxue xuebao. Lixue ban 磁场梯度 磁镜 磁控溅射 辉光 厚度梯度 |
| title | Formation of the film-thickness gradient for films deposited in a gradient magnetic field(梯度磁场中薄膜厚度梯度的形成机理) |
| title_full | Formation of the film-thickness gradient for films deposited in a gradient magnetic field(梯度磁场中薄膜厚度梯度的形成机理) |
| title_fullStr | Formation of the film-thickness gradient for films deposited in a gradient magnetic field(梯度磁场中薄膜厚度梯度的形成机理) |
| title_full_unstemmed | Formation of the film-thickness gradient for films deposited in a gradient magnetic field(梯度磁场中薄膜厚度梯度的形成机理) |
| title_short | Formation of the film-thickness gradient for films deposited in a gradient magnetic field(梯度磁场中薄膜厚度梯度的形成机理) |
| title_sort | formation of the film thickness gradient for films deposited in a gradient magnetic field 梯度磁场中薄膜厚度梯度的形成机理 |
| topic | 磁场梯度 磁镜 磁控溅射 辉光 厚度梯度 |
| url | https://doi.org/zjup/1008-9497.2002.29.4.395-399 |
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