Formation of the film-thickness gradient for films deposited in a gradient magnetic field(梯度磁场中薄膜厚度梯度的形成机理)
借助于基片下方放置的磁铁,在溅射的放电空间中引入了纵向的梯度磁场.辉光放电时,其外貌发生了显著的收缩,由此沉积的薄膜在平面内存在明显的厚度梯度.用磁场中带电粒子的运动理论解释了此种薄膜的形成机制.
| Main Authors: | , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Zhejiang University Press
2002-07-01
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| Series: | Zhejiang Daxue xuebao. Lixue ban |
| Subjects: | |
| Online Access: | https://doi.org/zjup/1008-9497.2002.29.4.395-399 |