Structural and Tribological Aspects on Ti (C,O,N) Magnetron Reactive Sputtered Thin-Films
Magnetron sputtering is a flexible technique and allows producing a significant amount of types of coatings. Within the frame of present work, Ti-C-O-N thin films were deposited onto high-speed steel (AISI M2), substrates by reactive dc magnetron sputtering in a laboratory-size deposition system. It...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Galati University Press
2007-11-01
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| Series: | The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science |
| Subjects: | |
| Online Access: | https://www.gup.ugal.ro/ugaljournals/index.php/mms/article/view/3140 |