Multistage Micropump System towards Vacuum Pressure
Fraunhofer EMFT’s research and manufacturing portfolio includes piezoelectrically actuated silicon micro diaphragm pumps with passive flap valves. Research and development in the field of microfluidics have been dedicated for many years to the use of micropumps for generating positive and negative p...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/12/6/227 |