Defect Detection of MEMS Based on Data Augmentation, WGAN-DIV-DC, and a YOLOv5 Model
Surface defect detection of micro-electromechanical system (MEMS) acoustic thin film plays a crucial role in MEMS device inspection and quality control. The performances of deep learning object detection models are significantly affected by the number of samples in the training dataset. However, it...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-12-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/22/23/9400 |