Thin ceramic PZT dual- and multi-frequency pMUT arrays for photoacoustic imaging

Abstract Miniaturized ultrasonic transducer arrays with multiple frequencies are key components in endoscopic photoacoustic imaging (PAI) systems to achieve high spatial resolution and large imaging depth for biomedical applications. In this article, we report on the development of ceramic thin-film...

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Bibliographic Details
Main Authors: Qincheng Zheng, Haoran Wang, Hao Yang, Huabei Jiang, Zhenfang Chen, Yao Lu, Philip X.-L. Feng, Huikai Xie
Format: Article
Language:English
Published: Nature Publishing Group 2022-11-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-022-00449-0