Modal Behavior of Microcantilevers Arrays with Tunable Electrostatic Coupling
We analyse the spectral content and parametric resonant dynamics of an array of elastically and electrostatically coupled interdigitated micro cantilevers assembled into two identical half-arrays. In this uncommon arrangement, within each of the half-arrays, the beams are coupled only elastically. T...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-10-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/12/10/386 |