Modal Behavior of Microcantilevers Arrays with Tunable Electrostatic Coupling
We analyse the spectral content and parametric resonant dynamics of an array of elastically and electrostatically coupled interdigitated micro cantilevers assembled into two identical half-arrays. In this uncommon arrangement, within each of the half-arrays, the beams are coupled only elastically. T...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-10-01
|
| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/12/10/386 |
| _version_ | 1797575118754414592 |
|---|---|
| author | Nir Dick Slava Krylov |
| author_facet | Nir Dick Slava Krylov |
| author_sort | Nir Dick |
| collection | DOAJ |
| description | We analyse the spectral content and parametric resonant dynamics of an array of elastically and electrostatically coupled interdigitated micro cantilevers assembled into two identical half-arrays. In this uncommon arrangement, within each of the half-arrays, the beams are coupled only elastically. The half-arrays are intercoupled only electrostatically, through fringing fields. First, by using the reduced order (RO) model, we analyse the voltage-dependent evolution of the eigenvalues and the eigenvectors of the equivalent mass-spring system, starting from the small two, three and four beams arrays and up to large beams assemblies. We show that at the coupling voltages below a certain critical value, the shape of the eigenvectors, the frequencies of the veering and of the crossing are influenced by the electrostatic coupling and can be tuned by the voltage. Next, by implementing the assumed modes techniques we explore the parametric resonant behavior of the array. We show that in the case of the sub critical electrostatic coupling the actuating voltages required to excite parametric resonance in the damped system can be lower than in a strongly coupled array. The results of the work may inspire new designs of more efficient resonant sensors. |
| first_indexed | 2024-03-10T21:32:58Z |
| format | Article |
| id | doaj.art-f02affad725241f589ab279545c13c82 |
| institution | Directory Open Access Journal |
| issn | 2076-0825 |
| language | English |
| last_indexed | 2024-03-10T21:32:58Z |
| publishDate | 2023-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Actuators |
| spelling | doaj.art-f02affad725241f589ab279545c13c822023-11-19T15:16:19ZengMDPI AGActuators2076-08252023-10-01121038610.3390/act12100386Modal Behavior of Microcantilevers Arrays with Tunable Electrostatic CouplingNir Dick0Slava Krylov1School of Mechanical Engineering, Faculty of Engineering, Tel Aviv University, Tel Aviv 69978, IsraelSchool of Mechanical Engineering, Faculty of Engineering, Tel Aviv University, Tel Aviv 69978, IsraelWe analyse the spectral content and parametric resonant dynamics of an array of elastically and electrostatically coupled interdigitated micro cantilevers assembled into two identical half-arrays. In this uncommon arrangement, within each of the half-arrays, the beams are coupled only elastically. The half-arrays are intercoupled only electrostatically, through fringing fields. First, by using the reduced order (RO) model, we analyse the voltage-dependent evolution of the eigenvalues and the eigenvectors of the equivalent mass-spring system, starting from the small two, three and four beams arrays and up to large beams assemblies. We show that at the coupling voltages below a certain critical value, the shape of the eigenvectors, the frequencies of the veering and of the crossing are influenced by the electrostatic coupling and can be tuned by the voltage. Next, by implementing the assumed modes techniques we explore the parametric resonant behavior of the array. We show that in the case of the sub critical electrostatic coupling the actuating voltages required to excite parametric resonance in the damped system can be lower than in a strongly coupled array. The results of the work may inspire new designs of more efficient resonant sensors.https://www.mdpi.com/2076-0825/12/10/386cantilevers arraytunable electrostatic couplingcrossingveeringreduced-order modelingparametric resonance |
| spellingShingle | Nir Dick Slava Krylov Modal Behavior of Microcantilevers Arrays with Tunable Electrostatic Coupling Actuators cantilevers array tunable electrostatic coupling crossing veering reduced-order modeling parametric resonance |
| title | Modal Behavior of Microcantilevers Arrays with Tunable Electrostatic Coupling |
| title_full | Modal Behavior of Microcantilevers Arrays with Tunable Electrostatic Coupling |
| title_fullStr | Modal Behavior of Microcantilevers Arrays with Tunable Electrostatic Coupling |
| title_full_unstemmed | Modal Behavior of Microcantilevers Arrays with Tunable Electrostatic Coupling |
| title_short | Modal Behavior of Microcantilevers Arrays with Tunable Electrostatic Coupling |
| title_sort | modal behavior of microcantilevers arrays with tunable electrostatic coupling |
| topic | cantilevers array tunable electrostatic coupling crossing veering reduced-order modeling parametric resonance |
| url | https://www.mdpi.com/2076-0825/12/10/386 |
| work_keys_str_mv | AT nirdick modalbehaviorofmicrocantileversarrayswithtunableelectrostaticcoupling AT slavakrylov modalbehaviorofmicrocantileversarrayswithtunableelectrostaticcoupling |