TCAD Analysis of Leakage Current and Breakdown Voltage in Small Pitch 3D Pixel Sensors
Small-pitch 3D pixel sensors have been developed to equip the innermost layers of the ATLAS and CMS tracker upgrades at the High Luminosity LHC. They feature 50 × 50 and 25 × 100 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><sem...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/10/4732 |