Phase retrieval from single interferogram without carrier using Lissajous ellipse fitting technology

Abstract Phase extraction from single interferogram is of high significance and increasingly interest in optical metrology. In this contribute we propose an advanced Pixel-level Lissajous Ellipse Fitting (APLEF) method to extract the phase from single interferogram without carrier. At each pixel, a...

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Bibliographic Details
Main Authors: Fengwei Liu, Yu Kuang, Yongqian Wu, Xiaojun Chen, Rongzhu Zhang
Format: Article
Language:English
Published: Nature Portfolio 2023-06-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-023-36584-5