Phase retrieval from single interferogram without carrier using Lissajous ellipse fitting technology

Abstract Phase extraction from single interferogram is of high significance and increasingly interest in optical metrology. In this contribute we propose an advanced Pixel-level Lissajous Ellipse Fitting (APLEF) method to extract the phase from single interferogram without carrier. At each pixel, a...

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Main Authors: Fengwei Liu, Yu Kuang, Yongqian Wu, Xiaojun Chen, Rongzhu Zhang
Format: Article
Language:English
Published: Nature Portfolio 2023-06-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-023-36584-5
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author Fengwei Liu
Yu Kuang
Yongqian Wu
Xiaojun Chen
Rongzhu Zhang
author_facet Fengwei Liu
Yu Kuang
Yongqian Wu
Xiaojun Chen
Rongzhu Zhang
author_sort Fengwei Liu
collection DOAJ
description Abstract Phase extraction from single interferogram is of high significance and increasingly interest in optical metrology. In this contribute we propose an advanced Pixel-level Lissajous Ellipse Fitting (APLEF) method to extract the phase from single interferogram without carrier. At each pixel, a Lissajous figure is created by plotting N against D, where N and D are subtractions and additions of intensities of adjacent pixels in a small window. The so created Lissajous figure is already in phase quadrature because of the subtraction and addition process, and the Lissajous Figure is forced to be closed by taking the opposite values of N and D, i.e. –N and -D into account. The closed and in phase quadrature Lissajous Figure is the key point for APLEF to demodulate the single inteferogram without carrier in theoretically. The simulation shows its higher accuracy than existed SPT and Garbusi’s method and the experiments finally corroborate its effectiveness.
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spelling doaj.art-f0a4694ccec748b0955cd8811eba7dc22023-06-25T11:15:54ZengNature PortfolioScientific Reports2045-23222023-06-0113111210.1038/s41598-023-36584-5Phase retrieval from single interferogram without carrier using Lissajous ellipse fitting technologyFengwei Liu0Yu Kuang1Yongqian Wu2Xiaojun Chen3Rongzhu Zhang4National Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of SciencesNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of SciencesNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of SciencesNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of SciencesSchool of Electronic and Information Engineering, Sichuan UniversityAbstract Phase extraction from single interferogram is of high significance and increasingly interest in optical metrology. In this contribute we propose an advanced Pixel-level Lissajous Ellipse Fitting (APLEF) method to extract the phase from single interferogram without carrier. At each pixel, a Lissajous figure is created by plotting N against D, where N and D are subtractions and additions of intensities of adjacent pixels in a small window. The so created Lissajous figure is already in phase quadrature because of the subtraction and addition process, and the Lissajous Figure is forced to be closed by taking the opposite values of N and D, i.e. –N and -D into account. The closed and in phase quadrature Lissajous Figure is the key point for APLEF to demodulate the single inteferogram without carrier in theoretically. The simulation shows its higher accuracy than existed SPT and Garbusi’s method and the experiments finally corroborate its effectiveness.https://doi.org/10.1038/s41598-023-36584-5
spellingShingle Fengwei Liu
Yu Kuang
Yongqian Wu
Xiaojun Chen
Rongzhu Zhang
Phase retrieval from single interferogram without carrier using Lissajous ellipse fitting technology
Scientific Reports
title Phase retrieval from single interferogram without carrier using Lissajous ellipse fitting technology
title_full Phase retrieval from single interferogram without carrier using Lissajous ellipse fitting technology
title_fullStr Phase retrieval from single interferogram without carrier using Lissajous ellipse fitting technology
title_full_unstemmed Phase retrieval from single interferogram without carrier using Lissajous ellipse fitting technology
title_short Phase retrieval from single interferogram without carrier using Lissajous ellipse fitting technology
title_sort phase retrieval from single interferogram without carrier using lissajous ellipse fitting technology
url https://doi.org/10.1038/s41598-023-36584-5
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AT xiaojunchen phaseretrievalfromsingleinterferogramwithoutcarrierusinglissajousellipsefittingtechnology
AT rongzhuzhang phaseretrievalfromsingleinterferogramwithoutcarrierusinglissajousellipsefittingtechnology